Wafers Geometry

ELECTRONIC (SEMICONDUCTOR) GRADE
Diameter (mm)	As-cut	76 ± 0.5*	100 ± 0.5*	125 ± 0.5*	150 ± 0.5*	200 ± 0.5*
Diameter (mm)	Lapped	76 ± 0.3	100 ± 0.3	125 ± 0.3	150 ± 0.3	200 ± 0.3
Thickness (mm)	As-cut	76 ± 0.3	350	500	700	700
Thickness (mm)	Lapped	300	400	560	625	625
Thickness Tolerance (mm	As-cut	± 25	± 25	± 25	± 25	± 25
Thickness Tolerance (mm	Lapped	± 25	± 25	± 25	± 25	± 25
Total Thickness Variation (mm)	As-cut	£ 10	£ 15	£ 25	£ 25	£ 25
Total Thickness Variation (mm)	Lapped	£ 4	£ 6	£ 8	£ 10	£ 10
Bow (mm)	As-cut	£ 25	£ 30	£ 40	£ 50	50
Bow (mm)	Lapped	£ 25	£ 30	£ 40	£ 50	50
§ *Orientation Flats – by SEMI M1 Standard or customer’s specification* § *Edge Rounding – by SEMI M1 Standard or customer’s specification* § *Orientation Tolerance – by SEMI M1 Standard or customer’s specification*